Schematic illustrations and fabrication results. (IMAGE)
Caption
a Sketch of the employed UV-LED-based microscope projection photolithography system. b Schematic illustration of process chain including steps from structure design to the final projection lithography. c High-resolution gratings fabricated using MPP. d Feature sizes below 200 nm achieved by MPP. The lines shown in the upper part and lower part were fabricated using a costly objective and an economic objective, respectively.
Credit
by Lei Zheng, Tobias Birr, Urs Zywietz, Carsten Reinhardt and Bernhard Roth
Usage Restrictions
Credit must be given to the creator.
License
CC BY