Design of the laser speckle exposure system (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Design of the laser speckle exposure system

Caption

Design of the laser speckle exposure system. Schematic representation of the laser speckle exposure system, comprising the UV laser, shutter, beam expander, mirror, convex lens, engineering diffuser, and wafer coated with photoresist.

Credit

by Yong Zhou, Kun Wang, Junkun Mao, Yifei Ma, Mei Wang, Suotang Jia, Xuyuan Chen, and Zhaomin Tong

Usage Restrictions

Credit must be given to the creator.

License

CC BY

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