Miniaturized Pre-Charged CMUT for Wireless Implant Powering. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

Miniaturized Pre-Charged CMUT for Wireless Implant Powering.

Caption

a Photograph of the fabricated pre-charged CMUT, b Cross-sectional schematic view of three cells, [through the blue dashed line in panel a], c Cross-sectional view in SEM [through the red dashed line in panel b – pseudocolor added for marking different layers].

Credit

Microsystems & Nanoengineering

Usage Restrictions

Credit must be given to the creator.

License

CC BY

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