Precise modulation of NbN structure based on the SMD (IMAGE)

Tsinghua University Press

Precise modulation of NbN structure based on the SMD

Caption

The state of the target varies with the parameters for the three sputtering modes, and the SMD consists of various voltage-current (V-I) curves at different nitrogen contents and sputtering currents. The three sputtering modes produce NbN films with different structures and stoichiometries.

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Nano Research, Tsinghua University Press

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