Overview of the monoGSA system. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

Overview of the monoGSA system.

Caption

Overview of the monoGSA system. a The architecture of the monoGSA where three different Knudsen pumps operate together to control the gas flow of the system. b 3D view of the monoGSA chip showing the monolithic integration of preconcentrator, column, and detector with Knudsen pumps, along with a 3D view of the sampling and separation flow paths within the monoGSA chip. c Conceptual illustration of a KP pumping channel.

Credit

Microsystems & Nanoengineering

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