Overview of the biaxial combinatorial sputtering approach and the resulting films. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

Overview of the biaxial combinatorial sputtering approach and the resulting films.

Caption

Overview of the biaxial combinatorial sputtering approach and the resulting films. a Schematic of the combinatorial radio frequency (RF) magnetron sputtering scheme; b mapping of composition ratio across a 2-inch wafer; c cross-sectional SEM images at various positions in the sample.

Credit

Microsystems & Nanoengineering

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CC BY-NC-ND

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