From nanoscale tungsten heaters to fabricated phase-change memory devices (IMAGE)

International Journal of Extreme Manufacturing

From nanoscale tungsten heaters to fabricated phase-change memory devices

Caption

The left panels illustrate the device substrate with 100 nm tungsten heaters and 500 nm ground contacts, including corresponding microscopy images, while the right panel shows the fabricated substrate containing arrays of phase-change heterostructure memory devices.

Credit

By Jun Young Choi§, Adila Rani§, Ho Jin Lee, Dong Hyun Kim, Jin Suk Oh, Jong Min Joo, Min Su Kang, Ji Eun Park, Kyeong Heon Kim and Tae Geun Kim*

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Credit must be given to the creator. Only noncommercial uses of the work are permitted.

License

CC BY-NC

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