Schematics of the fabrication process for ultrathin parylene based FPSCs (IMAGE)

Science China Press

Schematics of the fabrication process for ultrathin parylene based FPSCs

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(a) Deposition of parylene film on pre-cleaned glass. (b) Coating PDMS and placing another pre-cleaned glass immediately. (c) Peeling from glass (I) after PDMS solidified, then flipping over. (d) Cutting the films along the edge of glass (II). (e) Sputtering ITGZO. (f) Fabricating the rest layers of PTAA/Perovskite/PC61BM/BCP/Cu, successively. (g) Peeling from PDMS. (h) Fabrication of ultrathin FPSCs completed.

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