EUVL tool (VIDEO)
Caption
A Berkeley Lab researcher loads a photoresist-coated wafer into the EUV lithography tool at the Center for X-Ray Optics.
Credit
Marilyn Sargent/Berkeley Lab
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None
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Original content
DOE/Lawrence Berkeley National Laboratory
A Berkeley Lab researcher loads a photoresist-coated wafer into the EUV lithography tool at the Center for X-Ray Optics.
Marilyn Sargent/Berkeley Lab
None
Original content
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