Principle of the nanoscale multi-beam lithography to fabricate three-dimensional photonic crystal structures in crystals. (IMAGE)
Caption
a, Generation and tight focusing of femtosecond laser multi-beam optical field. b, Subwavelength photonic crystal structure fabrication and grating device preparation
Credit
by Jiaqun Li, Jianfeng Yan, Lan Jiang, Jiachen Yu, Heng Guo, Liangti Qu
Usage Restrictions
Credit must be given to the creator.
License
CC BY