Fig. 5 (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Fig. 5

Caption

Fig. 5 AI-driven ILT applications. EUV: extreme ultraviolet lithography. DUV: deep ultraviolet lithography.

Credit

Yang, Y., Liu, K., Gao, Y. et al.

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CC BY

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