MEMS cent (IMAGE)
Caption
Here we see the MEMS (Micro-Electro-Mechanical Systems) device combined with aluminium nitride in order to obtain a piezoelectric energy harvester. On the right, the full equipped device compared to a 1-cent coin. On the left, the microsystems’ details as seen through the magnifying lens of an optical microscope
Credit
Politecnico di Milano
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License
CC BY-NC-ND