Figure 2 | BTO on LSAT as an oxide platform for integrated high-performance electro-optic modulation. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Figure 2 | BTO on LSAT as an oxide platform for integrated high-performance electro-optic modulation.

Caption

Figure 2 | BTO on LSAT as an oxide platform for integrated high-performance electro-optic modulation. a, Optical micrograph of the fabricated Mach–Zehnder interferometer (MZI) based modulator, implemented on self-buffered BTO film in conjunction with SiN strip waveguides. Gold electrodes configured in a ground–signal–ground (GSG) layout are used for high-speed driving. b, Tilted-view scanning electron microscopy (SEM) image of the edge-coupling interface. The brown region corresponds to the SiN waveguide, the blue region to the BTO film, and the green region to the LSAT substrate. c, Simulated mode profiles of the photonic TE mode (top) and quasi-static electric field (bottom) within the modulator cross-section. d, Normalized optical transmission as a function of the applied voltage. The extracted half-wave voltage (Vπ) is 7 V, corresponding to a half-wave voltage-length product (VπL) of 0.7 V cm. e, Frequency response of the MZI modulator, showing the electro-optic bandwidth and the impedance matching condition of the microwave input.

Credit

Changzheng Sun et al.

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