Fig. 6. Distance accuracy metrological calibration system. (B) Distance measurement results of the DSB-FSI system and the Renishaw laser interferometer. (C) Measurement deviations of the DSB-FSI system relative to the Renishaw laser interferometer. (IMAGE)

Beijing Institute of Technology Press Co., Ltd

Fig. 6. Distance accuracy metrological calibration system. (B) Distance measurement results of the DSB-FSI system and the Renishaw laser interferometer. (C) Measurement deviations of the DSB-FSI system relative to the Renishaw laser interferometer.

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Fig. 6. Distance accuracy metrological calibration system. (B) Distance measurement results of the DSB-FSI system and the Renishaw laser interferometer. (C) Measurement deviations of the DSB-FSI system relative to the Renishaw laser interferometer.

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Space: Science & Technology

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