Optical microscope image of the silicon photonic chip area in the left and a closer view of the suspended MEMS micro-ring resonator filter in the right. (IMAGE)

SPIE--International Society for Optics and Photonics

Optical microscope image of the silicon photonic chip area in the left and a closer view of the suspended MEMS micro-ring resonator filter in the right.

Caption

Optical microscope image of the silicon photonic chip area in the left and a closer view of the suspended MEMS micro-ring resonator filter in the right. Successful integration of the MEMS device in the full stack of standard silicon photonic platform next to the grating couplers and the electrical bond pads.

Credit

The Authors, doi 10.1117/1.JOM.2.4.044001.

Usage Restrictions

NONE

License

Original content

Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.