Figure 3 | Multi axes crosstalk error analysis and correction method....Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS
Figure 2 | Prototype of the grating interferometer system for 3D measurement....Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS
Figure 1 | Framework of a grating interferometer system for 3-DOF measurement....Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS
