Researchers develop microlens-augmented atomic force microscopy for real-time nanoscale observation and control

Atomic force microscopy (AFM) is a cornerstone technique for nanoscale manipulation, and has applications in nanoparticle assembly, biomolecule handling, semiconductor device manufacturing, etc. Conventional AFM systems are unable to provide real-time, high-resolution in-situ imaging during manipulation. This long-standing "manipulation blind spot" significantly affects the operational precision and efficiency.

In a study published in Nano Research, a research team led by Prof. YANG Hui at the Shenzhen Institutes of Advanced Technology of the Chinese Academy of Sciences developed a novel platform coupling microlens-based super-resolution optics with AFM. The platform enables real-time super-resolution imaging visual guidance during manipulation, allowing for synchronous imaging and precise control of feature-sized targets down to tens of nanometers.

Researchers developed a method that combines super-resolution optical imaging based on microlens technology with AFM manipulation. By coupling a microlens to the end of a conventional AFM probe cantilever and depositing a diamond tip using focused ion beam, they fabricated a microlens-AFM probe. The AFM system controls the operating force, speed, and trajectory, while the coupling of the microlens and AFM optical path system provides real-time feedback to improve the efficiency and accuracy of nanomanipulation.

The platform provides a more than 10-fold improvement in imaging resolution, and enables real-time optical tracking and synchronous manipulation of 200-nm silver nanowires under non-destructive conditions. It also has an over 50% improvement in manipulation accuracy and an approximately 200% increase in operational efficiency.

The modular design of the probe ensures its compatibility with commercial AFM systems, which offers a versatile, cross-disciplinary platform for biosensing, nano-optics, and micro/nano manufacturing research without the need for equipment modification or overhaul.