Reliability. (IMAGE)

Science China Press

Reliability.

Caption

(a) The TZDB characteristics of capacitors with La: HZO and conventional HZO films. (b) Weibull distribution of breakdown voltages. Ten capacitors were measured in each case to examine their uniformity. (c) The Ec/EBD of FE capacitors with La: HZO and conventional HZO films annealed at different temperatures. Endurance characteristics of FE capacitors with (d) La: HZO and (e) conventional HZO films. (f) Retention time of the capacitor with La: HZO under different baking temperatures.

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